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| VSO(R) Low Flow Normally closed proportional solenoid valve FEATURES * 2-way normally closed * Applications where control is critical or flow is required below 600 sccm * Provides computer-automated calibrations and full calibration traceability * Uses either DC current or pulse width modulation with closed loop feedback to deliver optimal system performance * Maintains ideal flow through thermal compensation * Highly repeatable * Oxygen and analytically clean MEDIA COMPATIBILITY Air, argon, helium, hydrogen, methane, nitrogen, oxygen & others PHYSICAL PROPERTIES Operating environment Storage temperature Length 0 to 55 C -40 to 70 C 45.3 mm (1.785 in) 16.5 mm (0.625 in) 17 mm (0.67 in) manifold mount with 17 m screens 63 g (2.2 oz) 0.508 cm3 (0.031 in3) 17 m None required ELECTRICAL Power Voltage max. 2 W max. 6.5, 8, 12 or 18 VDC Width Height Porting Weight Internal volume Filtration (recommended) Lubrication VSO is a registered trademark of Parker Hannifin Corporation. October 2006 / 255 1/4 www.sensortechnics.com VSO(R) Low Flow Normally closed proportional solenoid valve PERFORMANCE CHARACTERISTICS Part no. 910000200... Orifice siz es 0.003" (0.076 mm) Leak rate1 0.2 sccm of helium (bubble tight) R esp o n se <15 msec cycling FLOW CURVE2 Notes: 1 sccm denotes Standard Cubic Centimeters per Minute. It is a unit for the flow rate at standard conditions of temperature and pressure. 1000 sccm = 1 slpm. 2 slpm denotes Standard Liters per Minute. It is a unit for the flow rate at standard conditions of temperature and pressure. 1 slpm = 1000 sccm. October 2006 / 255 2/4 www.sensortechnics.com VSO(R) Low Flow Normally closed proportional solenoid valve OUTLINE DRAWING Basic valve dimensions Port and mounting hole diagrams dimensions in inches (mm) October 2006 / 255 3/4 www.sensortechnics.com VSO(R) Low Flow Normally closed proportional solenoid valve ELECTRICAL INTERFACE (Wire leads, no terminals) PNEUMATIC INTERFACE (No barbs, face seal to manifold with screeen) ORDERING INFORMATION Coil selection Series Options 910 Model number Max. voltage* 000200 VSO, low flow, 0.003" (0.076 mm) orifice size 001: 002: 003: 004: 6.5 VDC 8 V DC 12 V D C 18 V D C Resistance** 47 68 136 274 Current*** 0.152 A 0.115 A 0.080 A 0.060 A * max. voltage for continuous full flow, ambient temp. 55C ** coil resistance for room temp. *** input current for full flow Example: 910 000200 001 Note: Not all combinations might be available. Please contact your nearest Sensortechnics sales representative for further information. Sensortechnics reserves the right to make changes to any products herein. Sensortechnics does not assume any liability arising out of the application or use of any product or circuit described herein, neither does it convey any license under its patent rights nor the rights of others. October 2006 / 255 4/4 www.sensortechnics.com |
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